| 摘要 |
An improved method of and apparatus for continuously depositing metallic oxide coatings that are highly electrically transmissive and highly electrically conductive onto a moving substrate. Electromagnetic energy is employed to develop an ionized plasma of metal and oxygen atoms, said plasma adapted for deposition onto the moving, large area substrate which, in the preferred embodiment, includes semiconductor layers thereon. The method and apparatus of this invention are further adapted for the improved, continuous deposition of other transmissive and conductive coatings which include low melting point metals onto the surface of moving plastic, glass or metallic substrate. |
