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发明名称
HEAT TRANSFER APPARATUS
摘要
申请公布号
GB2137664(A)
申请公布日期
1984.10.10
申请号
GB19840005240
申请日期
1984.02.29
申请人
* VARIAN ASSOCIATES INC
发明人
FREDERICK THOMAS * TURNER;MARTIN ALBERT * HUTCHINSON;RAYMOND HOWARD * SHAW;LAWRENCE TURNER * LAMONT
分类号
B65G49/07;C23C14/34;C23C14/50;C23C14/54;C23C14/56;H01L21/00;H01L21/02;H01L21/203;H01L21/285;H01L21/31;H01L21/3205;H01L21/67;H01L21/677;H01L21/687;(IPC1-7):C23C15/00
主分类号
B65G49/07
代理机构
代理人
主权项
地址
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