| 摘要 |
PURPOSE:To perform efficient electrodeposition with steps to a cathode (as a workpiece) in a short time without passing through a masking step, by applying laser beams to a part of said cathode during electrodeposition so as to make the speed of electrodeposition at said part of the cathode higher than that at the othr part of the cathode. CONSTITUTION:A cathode (as a workpiece) 2, an anode 3, a voltmeter 4, a power source 5, an X-Y driving means for carrying the cathode along the directions X and Y, a laser beam source 9, an ammeter, etc. are provided inside an electrodeposition cell 1. Hereon, the cathode 2 is faced to the anode 3 in an electrodeposition liquid 9, and an electric current is applied through the liquid 9 between the electrodes to perform electrodeposition on the surface of the cathode 2. At this time, the electrodeposition is performed while applying laser beams 7 to a part of the cathode 2. As a result, the speed of electrodeposition at said part of the cathode exposed to laser irradiation 7 can be made higher than that at the other part of the cathode. Hence, a rugged pattern can be formed on the surface of the workpiece without the need to mask said surface in advance of the electrodeposition.
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