| 摘要 |
PURPOSE:To accurately form a flow path and enable the fluid to be high accurately measured, by forming a groove on a silicon single crystal base plate by anisotropic etching and applying anisotropic etching so as to form a thin film part in a pressure measurement place on an outside face of the base plate. CONSTITUTION:Forming a groove 3 on a silicon single crystal base plate 1 by anisotropic etching, coating an opening part of the groove 3 by a glass plate 9 so as to constitute a fluid control device circuit 10 and applying anisotropic etching so as to form a thin film part 6 in the pressure measurement place of a circuit on an outside face of the base plate 1, a diaphragm type pressure sensor is constituted by the thin film part 6. In this way, the flow path 10, forming its cross section into a regular tetragonal shape, can be accurately formed even if it is a fine flow path, further a strain gage, being constituted in the thin film part 6 formed in the base plate 1 itself, never causes a turbulent flow in the fluid, enabling its measurement to be accurately performed. |
