PHOTOCHEMICAL VAPOR DEPOSITION DEVICE,申请号JP19830013761-传众专利搜索

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发明名称	PHOTOCHEMICAL VAPOR DEPOSITION DEVICE
摘要
申请公布号	JPS59140365(A)	申请公布日期	1984.08.11
申请号	JP19830013761	申请日期	1983.02.01
申请人	USHIO DENKI KK	发明人	SUGIOKA SHINJI
分类号	C23C16/24;C23C16/48;C23C16/50;F25B21/02;G03G5/08;G03G5/082;H01L21/205;H01L31/0248	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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