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发明名称
METHOD OF IDENTIFYING DEFECTS IN MASKS WITH REITERATED IMAGE FRAGMENTS
摘要
申请公布号
SU1104550(A1)
申请公布日期
1984.07.23
申请号
SU19833579542
申请日期
1983.04.07
申请人
SHAFER VALERIJ,SU
发明人
SHAFER VALERIJ I,SU
分类号
G06K9/00;G06K9/62;(IPC1-7):G06K9/00
主分类号
G06K9/00
代理机构
代理人
主权项
地址
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