METHOD FOR MASKING LAYER PRETREATMENT PRIOR TO CHARGED PARTICLE BEAM PROCESSING,申请号GB19830030673-传众专利搜索

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发明名称	METHOD FOR MASKING LAYER PRETREATMENT PRIOR TO CHARGED PARTICLE BEAM PROCESSING
摘要
申请公布号	GB2131226(A)	申请公布日期	1984.06.13
申请号	GB19830030673	申请日期	1983.11.17
申请人	* VARIAN ASSOCIATES INC	发明人	PETER RONALD * HANLEY
分类号	H01L21/027;H01L21/033;H01L21/265;H01L21/266;H01L21/302;(IPC1-7):H01L21/26;H01J37/31	主分类号	H01L21/027
代理机构		代理人
主权项
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