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发明名称
Verfahren zum Herstellen einer Halbleiteranordnung, insbesondere aus Silizium, einer Silizium-Germanium-Legierung oder aus Siliziumkarbid
摘要
申请公布号
DE1264619(B)
申请公布日期
1968.03.28
申请号
DE1965S097677
申请日期
1965.06.18
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
GUECKEL DIPL.-PHYS. HELMUT
分类号
H01L23/29;H01L29/00
主分类号
H01L23/29
代理机构
代理人
主权项
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