| 摘要 |
<p>PURPOSE:To provide a thermal head wherein the generation irregularity of cracks is reduced and high reliability in high power driving is enhanced by alleviating the internal stress of a protective layer, by forming the protective layer and applying annealing treatment thereto at specific temp. in air before applying plating to a terminal part. CONSTITUTION:A partial glaze layer 2 is provided on an insulating substrate 1 and a heat-generating resistor layer 3 made of Ta2N and a current supply layer 4 being a single layer made of Al or an Al-alloy or a two-layered current supply layer 4 consisting of Cr and Al are laminated on said glaze layer 2 and the current supply layer 4 is formed in a divided state so that the heat generating resistor layer 3 is positioned at the almost top surface part of the partial glaze layer 2. A first protective layer 5 of Si with a thickness of about 2mum and a second protective layer 6 with a thickness of about 5mum comprising Ta2O5 are formed to the current supply layer 4 by sputtering and, thereafter, the terminal part of the thermal head connected to Al of the current supply layer 4 is subjected to annealing treatment at 500-600 deg.C for about 30min in an Al-state using an electric furnace so as to avoid quick heating and quenching. After annealing treatment, plating of Ni or Cu and Sn or a Sn-alloy is applied to the Al-terminal part.</p> |
