| 摘要 |
PURPOSE:To obtain a method for displaying each element in each color and the distribution of the detected element, by a method wherein a color filter specific to an element is used at every the element to be detected to perform multiple exposure and the distribution state of each element is subjected to color display on a same photosensitive film. CONSTITUTION:As a color filter 31 mounted in an exchangeable manner, a plurality of color filters are prepared and a secondary electron beam image is photographed with respect to a same specimen in the same way as is conventional. Succeedingly, a detector 6 is set to a position capable of detecting an element to be detected. In this case, each color is preliminarily indicated with respect to each element while the color filter 31 is set so as to be capable of photographing the color of the element to be detected on a color film and the photograph of this specific element is taken. In the next step, the detector 6 is similarly set at every each element while the color filter 31 is exchanged at every the element to perform multiple exposure on the same film. |
