| 摘要 |
PURPOSE:To remove a neutral corpuscular beam mixed in a primary ion beam, by disposing a propagation path for the ion beam having passed an exhaust slit at the ion source side at a position outside the ion beam passing region of another exhaust slit for deflection. CONSTITUTION:An ion microanalyzer is made up of the following processes that a deflecting electrode 16 is installed between exhaust slit 5 and a lens 6, and the regions of the slit 5 and an exhaust slit 7 are made into a high vacuum, while an ion source 3 is disposed so as to cause a propagation path for an ion beam having passed the slit 5 to be situated outside the ion beam passing region and then a secondary ion out of a sample 9 is fed to a mass spectrometer 10. Therefore, a neutral corpuscular beam 17 to be mixed in the ion beam goes straight without receiving deflection by the deflecting electrode 16 and is intercepted by the slit 7, eliminating the influence of the neutral corpuscular beam, thus highly accurate analysis can be achieved. |
