METHOD AND APPARATUS FOR FORMING THIN FILM

摘要

PURPOSE:To maintain drying power for a long period of time by drying gases for forming a thin film by using the film of a fluorine copolymer having a cation exchange group. CONSTITUTION:The gases for forming the thin film are introduced into a reduced or atm. pressure system to cover the surface of a substrate with the thin film in a method for forming the thin film on the substrate placed in the reduced or atm. pressure atmosphere. The gases for forming the thin film are dried by bringing the gases into contact with one side of the film of the fluorine copolymer having the cation exchange group and bringing a dried purging gas into contact with the other side or reducing the pressure on the other side.