USE OF A CONDUCTIVE ORGANIC CHARGE TRANSFER MATERIAL AS ELECTRON BEAM SENSITIVE RESIST COMPOSITION, AND METHOD OF FORMING POSITIVE AND NEGATIVE RESIST IMAGES
摘要
申请公布号
EP0023988(B1)
申请公布日期
1984.02.29
申请号
EP19800104214
申请日期
1980.07.18
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ENGLER, EDWARD MARTIN;KUPTSIS, JOHN DEMOSTHENES;SCHAD, ROBERT GERARD;TOMKIEWICZ, YAFFA
