| 摘要 |
PURPOSE:To prevent a wafer from being contaminated or damaged due to its drop by supporting the wafer by a pin when placing it, and attracting fixedly the wafer by an aspirator provided on a wafer stage when fixing it to eliminate the lateral slip of the wafer when placing it. CONSTITUTION:Three or more pins 2 rounded at the ends are projected from holes formed on the upper surface of a wafer stage 1 having a flat upper surface. Weak springs 3 for lifting the pins 2 upward are disposed under the pins 2, and the lifting forces of the pins 2 are regulated by adjusting screws 4 for supporting the springs 3. The tension of the spring 3 is of the degree that is is lightly sunk when placing a wafer 5 but to maintain the height not to cause the wafer to lateral slip. The hole of an aspirator 6 is provided at the center of the stage 1. When the wafer is placed on the stage 1, the wafer 5 is supported to the pin 2, and does not laterally move at all. The wafer 5 is completely fixed without damage. |
