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发明名称
DIFFUSIONNFURNACE PIPE FOR FORMING A SEMICONDUCTOR OXIDE FILM
摘要
申请公布号
JPS51142271(A)
申请公布日期
1976.12.07
申请号
JP19750064158
申请日期
1975.05.30
申请人
TOUKAI KAABON KK
发明人
AKIYAMA MASARU
分类号
C30B25/08;H01L21/22;H01L21/316
主分类号
C30B25/08
代理机构
代理人
主权项
地址
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