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发明名称
FORMATION OF COPPER OR COPPER ALLOY ELECTRODE WIRING
摘要
申请公布号
JPH01308028(A)
申请公布日期
1989.12.12
申请号
JP19880139711
申请日期
1988.06.07
申请人
FUJITSU LTD
发明人
HOSHINO KAZUHIRO
分类号
C23F4/00;H01L21/302;H01L21/3065;H01L21/3213
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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