SEMICONDUCTOR HEAT TREATMENT DEVICE,申请号JP19880186111-传众专利搜索

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发明名称	SEMICONDUCTOR HEAT TREATMENT DEVICE
摘要
申请公布号	JPH0234915(A)	申请公布日期	1990.02.05
申请号	JP19880186111	申请日期	1988.07.25
申请人	MITSUBISHI ELECTRIC CORP	发明人	YAMAMOTO HIROHISA;MATSUDA SHINTARO;EGUCHI MASANAO
分类号	H01L21/26	主分类号	H01L21/26
代理机构		代理人
主权项
地址

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