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发明名称
SEMICONDUCTOR ELECTRICAL PHYSICAL PARAMETER DETERMINATION METHOD
摘要
申请公布号
SU1057887(A1)
申请公布日期
1983.11.30
申请号
SU19823412597
申请日期
1982.03.24
申请人
SMIRNOV VYACHESLAV,SU;PANASYUK VITALIJ N,SU
发明人
SMIRNOV VYACHESLAV I,SU;PANASYUK VITALIJ N,SU
分类号
H01L21/66;G01R31/26;(IPC1-7):G01R31/26
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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