ATMOSPHERIC PRESSURE PLASMA SURFACE TREATMENT APPARATUS HAVING INJECTION PIPES

摘要

PURPOSE: An atmospheric pressure plasma surface treatment apparatus having injection pipes in which a plasma surface treatment zone is not limited to a space between two electrodes by using the injection pipes so that the surface of an object to be treated of a complicated shape is also easily treated is provided. CONSTITUTION: In an atmospheric pressure plasma treatment apparatus for treating the surface of an object to be treated using the plasma after flowing in gas between two electrodes so that plasma is generated by electric discharge, the atmospheric pressure plasma surface treatment apparatus having injection pipes comprises a first electrode(21); a second electrode(22); injection pipes(25-1 to 25-6) which are positioned between the first and second electrodes to inject plasma onto the object to be treated by receiving a certain gas; and a power supply which generates electric discharge in the injection pipes by impressing a certain voltage between the first and second electrodes, and supplies a power source for converting the gas into the plasma state accordingly, wherein any one electrode in the first and second electrodes(21,22) is coated with a dielectric(23a,23b), the injection pipes are cylindrical pipes or polygonal pipes, and the injection pipes have diameter of 0.1 to 500 mm and thickness less than 20 mm.