发明名称 PELLET FEEDER
摘要 PURPOSE:To feed the pellets efficiently by a method wherein, after receiving pellets in the holes on a receiving surface, numerous pellets are simultaneously fed to the specified position of an assembling jigs releasing adsorption after they are adsorbed and reversed and any surplus pellets are collected and transferred to a recovery unit for storage by revertion. CONSTITUTION:When the pellets 1 are fed on a surface 22, a lever 62 is pivoted to swing a frame 60 in turn swinging main body 13, reversing body 11 and turning mechanism 14 through the intermediary of a bar 66. Besides the main body 13 is horizontally swung by pivoting another lever 68 through the intermediary of a metal fitting 67. On the other hand, a slight oscillating body 58 is constantly oscilated. The pellets 1 are put into a hole 23 by means of combined oscillation to be adsorbed to the hole 23 one by one by operating a valve 50. Next a reversing body 11 is pivoted up to 180 deg. around an axle 30 by means of aircylinder 48, rack 46 and pinion 47 under external command. Any surplus pellets flow into the pinion 47 and the pellets in the hole 23 are opposed to a receiver 101 while the pellets released from their adsorption by operating the valve 50 are dropped into the receiver 101 by slight oscillation. Through this constitution, the feeding of pellets and the removal of surplus pellets may be performed rapidly and automatically.
申请公布号 JPS58188136(A) 申请公布日期 1983.11.02
申请号 JP19820070421 申请日期 1982.04.28
申请人 TOKYO SHIBAURA DENKI KK 发明人 TSUSHIMA HIDEO;IKUTA HIDEKAZU
分类号 H01L21/677;H01L21/68;(IPC1-7):01L21/68 主分类号 H01L21/677
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