| 摘要 |
An electronic microscope with a one-stage-type deflector compensates for the astigmatism of the object lens. It has a compensator with eight legs(lla-llh) wound by eight coils(12a-12h), which compensate for the astigmatism and overlap with the deflecting coils(14a-14e) for X,Y axises on the conpensating coils. The compensator is placed peripheral to the outskirt of the object lens so that the high-speed deflection and the diagonal deflection are achieve with the one-stage type deflector.
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