| 摘要 |
PURPOSE:To prevent the loss of an optical fiber and connector from entering as an error and to enable to perform a high-precise measurement, by a method wherein a pressure gauge employs a photo pressure sensor, which has transmissivity and reflecting rate changing with a pressure and a wavelength dependency, and consists of a two-wavelength system. CONSTITUTION:An emitting light having wavelengths lambda1 and lambda2 are combined together by a photo composing device 12, and is introduced to a photo pressure sensor 4 through an optical fiber 15 for entering. The sensor 4 converts an incident light into a parallel light by means of a micro lens 21, and after the light passes through a dichroic mirror 20 attached to a diaphragm 5, it is combined with an optical fiber 16 by a micro lens 22 to lead it to a photo electric converter 6. The electric signal of the converter 6 is converted into a DC signal by sample holding amplifiers 17 and 18 synchronizing with driver circuits 8 and 9, and is divided by a divider 19. The division removes an error produced due to a transmission loss and a connector loss, which results in being capable of performing a precise measurement. |
