| 摘要 |
PURPOSE:To compute the size of the width of a pattern based on the angle formed with each cursor, by approximating the values of a plurality of positions obtained from an edge part, among the values of the positions corresponding to the width measuring positions to the values forming a straight line by a least square method. CONSTITUTION:The cursors K1 and K2 are moved to approximately intermediate points E and F of the lower part of the pattern. These positions are specified as width size position of the mark. The following operation is automatically performed. The specified positions of a point Po and cursors K1 and K2 are automatically read by the electronic computer 4. Relations between the specified positions and the peak to peak value a/b and a'/b are computed and memorized. Then the scanning position P1 is scanned at a minute interval. Curves theta and theta' formed by coordinate values from the edge part are approximated to a straight line by the least square method. The angle theta and theta' formed by the resulting straight lines and the cursors K1 and K2 are computed, and the product of the value of the size and costhetac is computed. The vaue is made to be the width size of the pattern at the scanning position. |
