| 摘要 |
PURPOSE:To detect the roughness of the surface of an object to be detected at a high speed by forming the image of beams on a screen in each row of a position array and inputting outputs from position sensors which are opposed to each other to a subtractor or the like. CONSTITUTION:Light from a projecting lamp 1 is irradiated to an object 4 to be detected through a slit 2 and a lens 3 as two parallel light rays (a), (b), the reflected light rays are projected to a screen 6 and an image is formed on a position array 7. Outputs from the position sensors 8 which are opposed to each other in the position array 7 are inputted to a subtractor 10 and an output from the subtractor 10 is inputted to an adder through an absolute value circuit which is not shown in the figure, so that the rough area of the object 4 to be detected is detected and the detected value is inputted to a maximum value circuit which is not shown in the figure to detect the size of the roughness. |
