| 摘要 |
PURPOSE:To reduce considerably a signal voltage to be impressed to a piezoelectric vibrator by such an arrangement wherein a groove is provided along the outer circumference of a substrate piezo element and such a force that obstructs the deformation of the diaphragm portion of the piezoelectric vibrator is removed by said groove. CONSTITUTION:An ink nozzle 1, a pressure chamber 2 and an ink preparation chamber 9 are formed by sticking a lower substrate 4 to an upper substrate 7 partially containing the diaphragm portion 6 of a piezoelectric vibrator, and a piezo element 5 having electrodes 51, 52 on its both sides is sticked to a position corresponding to the pressure chamber 2 of the upper substrate 7. A groove 11 is provided at part or all of the outer circumference of the piezo element of the upper substrate 7. By the provision of the groove 11, the influence the diaphragm portion 6 receives from the upper substrate 7 in its vicinity becomes smaller, and as a result, it becomes possible to considerably reduce a signal voltage to be impressed to the piezoelectric vibrator 5. |
