摘要 |
PURPOSE:To reduce the size over the entire part of a titled device by making the X-rays from an X-ray source incident to asymmetrically cut crystals, reflecting the X-rays at specific reflection angles by the crystals and making the X- rays incident to a sample. CONSTITUTION:The 1st crystal C1 which is channel cut or single cut is disposed between an X-ray source 21 and a sample 23. The X-rays 22 made incident to the sample 23 through the crystal C1 emerge from the sample 23 as scattered X-rays. The scattered X-rays are made incident to a detector 24 by providing the 2nd crystal C2 which is channel cut or single cut between the sample 23 and the detector 24. Since the intensity of the X-rays to be detected increases, asymmetrical reflection is used for the 1st crystal C1 and the 2nd crystal C2. |