| 摘要 |
PURPOSE:To enable to perform the detection of micro-unevenness on an object to be inspected and to permit the observation of the whole surface of the object to be inspected at one time, by diffusing and collecting light from a light source by means of a concave mirror. CONSTITUTION:Light, which is emitted from a light source 1 and passes through a pin hole 2, is reflected by a first concave mirror to produce diffusion light with which a mirror-surfacelike object 3 to be inspected is irradiated. After light reflected by the object 3 to be inspected is collected by a second concave mirror 9, light is collected by a third concave mirror 10, and an image is formed on a light receiving surface 4. In case a concavity 5 is formed in the object 3 to be inspected, the concavity 5 performs the same function as that of the concave mirror, and light from the light source 1 is scattered. Thus, light is reflected from the object 3 to be inspected in conformity with a change in luminous intensivity. Thus, from a change in illuminance distribution of reflected light, a condition of the surface of the object to be inspected can be inspected in a non-contact manner. |
