NEUTRAL-PARTICLE DETECTING DEVICE

摘要

PURPOSE:To increase the resolution of a neutral-particle detecting device, and enable highly-accurate measurement of neutral particles by providing both a momentum analyzer which changes the magnetic-flux density of a magnetic field step by step, and detecting circuit which detects momentum eneryg according to the peak of a signal sent from a particle detector. CONSTITUTION:Charged-particle beams discharged from an ionizer 101 are made to become incident upon a momentum analyzer 106. The analyzer 106 is controlled by a controlling circuit 107, and constituted so that its magnetic-flux density changes step by step. One particle detector 108 is provided so that it faces to the end of the analyzer 106 from which beams are discharged. When charged particles become incident upon the detector 108, a pulse signal having a peak corresponding to the energy of each charged particle is delivered from the output of the detector 108. The output signal sent from the detector 108 is introduced into an amplifier 113, and sent out into a detecting circuit 114 constituted of a peak-analyzing circuit 115 and a treating circuit 116.