发明名称 Miniaturized accelerometer with piezoelectric FET
摘要 An accelerometer comprising a piezoelectric device hard mounted to the gate electrode of a field effect transistor, thus avoiding the capacitance of an interconnecting coaxial cable connection and providing, therefore, improved frequency response in a smaller, more efficient package.
申请公布号 US4378510(A) 申请公布日期 1983.03.29
申请号 US19800169540 申请日期 1980.07.17
申请人 MOTOROLA INC. 发明人 BENNETT, CHARLES E.
分类号 G01P15/12;H01L29/84;(IPC1-7):H01L29/84 主分类号 G01P15/12
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