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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPS5834174(A)
申请公布日期
1983.02.28
申请号
JP19810131174
申请日期
1981.08.20
申请人
MATSUSHITA DENKI SANGYO KK
发明人
TAKASE YOSHIHISA
分类号
H05K3/06;C23F1/00;G03C1/00;G03F7/004;H05K3/04
主分类号
H05K3/06
代理机构
代理人
主权项
地址
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