| 摘要 |
PURPOSE:To enable to simply and clearly detect an etching end point while uniformly etching at a high speed by measuring in synchronism with one scanning direction of magnetic field generating means. CONSTITUTION:A magnetic field produced by permanent magnets 1a-c provided under the electrode 5 and a magnetron discharging area 13 of very high density produced by an orthogonal electromagnetic field with a DC electric field generated on an electrode 5 applied with a high frequency electric power for generating the high frequency electric power are scanned on a material 6 to be etched by scanning in one direction along the back surface of a cathode 5 by a drive motor 4 for magnetic field generating means 1a-c, 12), thereby etching a sample at a high speed with good uniformity. A slitlike quartz window 28 is opened to observe the area 13 by the scan of the magnet in a vacuum container 8, and the end 29 of the optical fiber is moved along the surface of the window 28 in synchronism with the scanning of the magnetic means. The etching end point can be detected by a monochromatic meter connected to the other end of the optical fiber as the sharp spectral change. |
