| 摘要 |
PURPOSE:To accurately detect a projected pattern to X or Y axis, by detecting the direction when a pattern is tilted and reading the information in a detection window toward the tilted detection angle. CONSTITUTION:An output signal from the 1st binary processing means 4a is detected for a tilt with a tip tilt detection means 15, and a reading angle is calculated with a calculating means 16 for in-window signal reading angle. In the means 15, as shown in Figure, scanning is made vertically and horizontally at location apart from lx1 and ly1 at right and lower side from a corner C1 to detect shifts DELTAx1 and DELTAy1 due to tilt. Thus, the calculation means calculates the reading angle. The address of a pad pattern P'1 in a window 11 is read out toward a tilted direction with a pad detection window signal reading means 17 with this output. Thus, the address of the center point is recognized from both x and y coordinates. |
