| 摘要 |
PURPOSE:To reduce the temperature fluctuation of a melt in a crucible, by coupling one end of a transverse reaction tube to the upper part of a longitudinal reaction tube as a furnace body with the other end of the transverse reaction tube for a furnace port. CONSTITUTION:The transverse reaction tube 1b is settled on the upper part of the longitudinal reaction tube 1 settling the crucible 2 as the furnace body. In the liquid epitaxial growth furnace of this constitution, the furnace port 1a is not settled directly above the crucible 2 so that the convection in the longitudinal reaction tube 1 is prevented while reducing the inner temperature fluctuation of the crucible 2. Besides, evaporation precipitates attached on the furnace port 1a is prevented from dropping into the crucible 2. |
