| 摘要 |
PURPOSE:To permit an upper table to move into up-and-down and horizontal direction but prevent from the inclination thereof by a method wherein the upper table is disposed on a lower table equipped with an elastic support device through two sets of levers having different coupling directions by substantially right angle repsectively. CONSTITUTION:An air spring 12 is disposed on the lower table 10 while the upper table 11 is arranged thereon through levers 15, 26. The lever 15 is secured to the upper table 11 through linear members 22, 23 and the lever 26 is secured to the upper table 11 through the linear members 32, 33, while they are coupled with the different directions by right angles substantially respectively. A hole 36 is provided on the lever 26 and the contacting part 25 of the lever 15 with the air spring 12 is penetrated therethrough so as to constitute it to be movable into the horizontal direction in some degree together with the contacting part 35 of the lever 26. According to this method, the upper table 11 is mavable to the up-and-down and horizontal directions but prevented from inclining perfectly, therefore, the vibration insulation in the up-and-down directions may be effected in an excellent condition. |
