| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle storage container preventing adhesion of a foreign matter by covering a pellicle fixed to a container body, with a lid body, surely retaining the fixed state even during transport and, when unsealing it by opening the lid body, easily releasing the fixing state to allow the takeout of the pellicle. <P>SOLUTION: The pellicle storage container comprises a container body 12 on which a pellicle 16 is placed, and a lid body 14 for covering the pellicle 16. The container body 12 includes: a plurality of pellicle fixing parts 18 each of which includes a pin 28 which can be rotationally turned with a tip end 28a inserted into a recessed part 26 of a pellicle frame 16a of the pellicle 16, and a pin mounting part 32 on which the pin 28 is detachably mounted; and a protrusion part 30 and a notch part 32a as retaining means for retaining the pin 28. The retaining means rotationally turns the pin 28 that is mounted in the pin mounting part 32 of each pellicle fixing part 18 and of which the tip end 28 is inserted into the recessed part 26 of the pellicle frame 16a, at a predetermined angle so as to prevent the pull-out of the tip end 28a of the pin 28 from the recessed part 26. <P>COPYRIGHT: (C)2013,JPO&INPIT |
