| 摘要 |
PURPOSE:To package a damping liquid so as not to leak even under severe application environment conditions, by providing a vibrator and a damping liquid in a harmetic package which comprises an airtight sealed metal cap and a metal base. CONSTITUTION:A sensor comprising a cantilever 4a and a pedestal 6 is carried on a metal base 100, a hard glass 500 is welded highly airtight at a through hole for electrical connection with the outside and a lead terminal 400 is fixed therethrough. A projection exists over the entire circumference of a weld part 101 of the base 100 and the projection is electrically energized in contact with the weld part 601 of a box-shaped metal cap 600 comprising covar or the like to weld both the parts. Then, an injector 900 is inserted into a hole 602 of the cap 600 to inject a damping liquid 700 such as silicon oil by about 70-80% of the total capacity. After the injection, the injector 900 is removed and a hole 602 and an escape hole are sealed by soldering. This seals a small amount of air 800 thereby make the apparatus withstand the expansion and contraction of the liquid 700 due top wide-range temperature changes as well. |
