发明名称 GROOVING DEVICE FOR DYNAMIC PRESSURE BEARING
摘要 PURPOSE:To execute simple and exact grooving without using a photomask by executing control in accordance with the numerical information on the pattern of grooves so as to project laser light to the desired range of a photoresist coated on the surface of a work piece. CONSTITUTION:An angle theta between the axial line A in the shaft part 12 of a bearing and the optical axis C of the laser light changes but the optical axis C intersects always perpendicularly with the photoresist surface of a spherical body 11 at one point P when a table 21 is horizontally rotated. The rotating angle phi of the spherical body 11 around the horizontal axis B of the holder 22 in the shaft part 12 corresponds to an azimuth. A controller 19 of such constitution rotates the holder 22 by one turn to move the projection point P and projects the laser light from a laser light device thereto in accordance with the numerical information on the pattern of the grooves while the turn table 21 is held stopped. The above-mentioned operation is successively repeated while the projection angle theta is changed each slightly to form the spiral grooves 15 on the spherical body 11. The grooving is thereby simply and exactly executed without using the photomask.
申请公布号 JPS63103086(A) 申请公布日期 1988.05.07
申请号 JP19860249843 申请日期 1986.10.20
申请人 KOYO SEIKO CO LTD 发明人 FUJIMOTO YASUKAZU;MORIKAWA KENSUKE;ONISHI MASAYOSHI
分类号 C23F1/00;F16C17/10;F16C33/14 主分类号 C23F1/00
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