METHOD OF DESIGNING SEMICONDUCTOR FABRICATION FACTORY AND DESIGN SIMUMATION APPARATUS FOR PERFORMING THE SAME

摘要

In a design method of a semiconductor manufacturing factory, reference information with respect to a facility to be installed in the semiconductor manufacturing factory is received. Verification items required for actually operating the facility are set. Design verification with respect to the verification items is performed to check a design error of a basic design in accordance with the reference information. Therefore, the method can reduce costs for modifying and remodeling the design.