| 摘要 |
PURPOSE:To prevent the adhesion of dust in air and the stain of a cartridge or the like onto a tabular material by a method wherein the cartridge encasing the tabular material is immersed in water, the tabular material is taken out one by one, dried and encased in another cartridge. CONSTITUTION:The cartridge 17 encasing a plurality of wafers 19, washing thereof is completed, is placed onto the cartridge supporter 11 of a loader 5. The cartridge 17 is immersed in clean water in a water tank 8. The wafers 19 are extruded from the cartridge 17, and moved onto a loader base 30 while moving in water. The wafers 19 are set to one supporting section 33 in rotary disks 6a through the groove 34a of a cover 34. Waterdrops adhering on the surfaces of the wafers 19 are scattered centrifugally by turning the rotary disks 6a at high speed, and the wafers are dried. The wafers 19 are moved onto an unloader base 39 from a rotary section 6 by means of a pusher 38. |
