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发明名称
CORRECTION OF DEFLECTION DISTORTION
摘要
申请公布号
JPS57138757(A)
申请公布日期
1982.08.27
申请号
JP19810024327
申请日期
1981.02.23
申请人
HITACHI SEISAKUSHO KK;NIPPON DENSHIN DENWA KOSHA
发明人
SAITOU NORIO;OZASA SUSUMU;SHIMAZU NOBUO;OOKUBO TSUNEO
分类号
H01J37/147;H01J37/153;H01J37/304;H01J37/305;H01L21/027
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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