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发明名称
摘要
申请公布号
DE2342221(C2)
申请公布日期
1982.06.09
申请号
DE19732342221
申请日期
1973.08.21
申请人
VARIAN ASSOCIATES, INC., 94303 PALO ALTO, CALIF., US
发明人
MIRAM, GEORGE VALENTINE, DALY CITY, CALIF., US;KUEHNE, GERHARD BERTHOLD, SANTA CLARA, CALIF., US
分类号
H01J23/065;(IPC1-7):H01J23/06;H01J29/48
主分类号
H01J23/065
代理机构
代理人
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