| 摘要 |
PURPOSE:To moderate the temperature rise of a bearing caused by directly heating the shoulder part of a rotor resulting from the thermal radiation from the back side of a target, by providing a shielding plate which covers the shoulder part of the rotor. CONSTITUTION:A truncated cone like target 1 is attached to a rotor 3 through a prop and the target 1 is made to rotate by means of the rotor 3. A thermal shielding plate 7 is provided so that this plate 7 may cover the shoulder part 3' of a rotor facing the back side of the target 1. The thermal shielding plate is like a cup whose maximum part diameter is larger than that of the rotor drum and whose side toward the target is a member made of molybdenum, tantalum and iron of 0.3-1.0mm. in thickness, and mounted by means of screws or brazing. |
