| 摘要 |
PURPOSE:To eliminate the regulation of the acceleration voltage, by obtaining the ion acceleration voltage when predetermined output is produced on each ion collector while setting the ion acceleration voltage produced from an ion acceleration voltage scanning circuit to said level. CONSTITUTION:The potential between an ionization chamber and a slit in a body 10 or the ion acceleration voltage is provided from an ion acceleration voltage scanning circuit 11. The output signal from an ion collector in the body 10 is provided through a differential circuit 12 to a pulse detection circuit 13. The output from said circuit 13 is provided to an arithmetic circuit 14 and a control circuit 15. The control circuit 15 will control said circuit 11 on the basis of the output from said circuits 13 and 14 thus to set the ion acceleration voltage to predetermined level. |
