发明名称 |
PLANAR THIN FILM TRANSISTOR ARRAY AND METHOD OF PRODUCING SAME |
摘要 |
<p>A planar thin film transistor is described wherein each element of the transistor structure is disposed in a planar relationship with respect to the next adjacent layer. The method of manufacture generally includes the steps of depositing one of the elemental members of a thin film transistor structure and filling in the valleys between the elemental structure with an insulating material to form a planar surface which, in turn, forms the surface upon which the next planar layer is formed.</p> |
申请公布号 |
JPS5721867(A) |
申请公布日期 |
1982.02.04 |
申请号 |
JP19810078792 |
申请日期 |
1981.05.26 |
申请人 |
XEROX CORP |
发明人 |
MAIKURU POORUSHIYUTSUKU;JIYOSEFU JIEI UISOTSUKI |
分类号 |
H01L29/78;G02F1/1343;G02F1/136;G02F1/1368;H01L21/336;H01L21/77;H01L21/84;H01L27/10;H01L27/12;H01L29/786 |
主分类号 |
H01L29/78 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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