BORIDING METHOD FOR ALUMINUM

摘要

PURPOSE:To obtain an acoustic component part having a high specific modulus of elasticity by a method wherein a gaseous mixture of BCl3 or B2H6 with H2 is converted into a plasma at a predetermined pressure and the plasma is flowed over an aluminum substrate being heated to a temperature within a specified temperature range. CONSTITUTION:The aluminum substrate is placed in a furnace core tube and the tube is evacuated. Next, the gaseous mixture of H2 and BCl3 or of B2H6 and H2 is flowed through the pipe in such a manner as to adjust the pressure inside the pipe at 0.5-10Torr. Then, while heating the substrate at a temperature in the range of 300-500 deg.C, a high-frequency current is passed through a coil wound around the tube to convert the gaseous mixture into a plasma. Accordingly, the aluminum substrate is borided to form aluminum boride having a high specific modulus of elasticity.