| 摘要 |
PURPOSE:To prevent any warpings and cracks generated during the formation of a photoconductive film, and enhance the yield of manufacturing the film by using a transparent thin plate prepared from sapphire, and using a thermally treated crystalline photoconductive film as a photoconductive film. CONSTITUTION:The inner surface of a face plate 1 made of glass is provided with a color filter film 2. A transparent thin plate 10 made of colorless sapphire, or aluminum oxide, is stuck with an adhesive to the inner surface of the film 2, after another surface of the thin plate 10 is provided with both a transparent conductive film 11 made of tin oxide, indium oxide or the like, and a cyrstalline photoconductive film 12. As the film 12, for example, New becon film can be employed. The New becon film is made by forming a hole prevention first layer made of ZnO, CdSe or the like on the base plate the temperature of which is maintained at 150-400 deg.C, before the second layer is formed by vacuum deposition or the like. Consequently, the yield of the manufacture can be enhanced. |
