发明名称 PHOTOSENSITIVE COMPOSITION
摘要 PURPOSE:To form a film with high surface strength and high resistance to an etching soln. by adding a reaction product of a specified cellulose ether and an anhydrous aromatic polybasic carboxylic acid to a photosensitive resin component. CONSTITUTION:A cellulose ether compound such as hydroxypropylcellulose or hydroxypropylhydroxyethylcellulose represented by R<1>a, R<2>bA or R<3>cR<4>dR<5>eA is reacted with an anhydrous aromatic polybasic carboxylic acid such as tetrahydrophthalic anhydride to prepare a cellulose ether aromatic carboxylic acid ester compound. One or more kinds of such compounds are mixed with a resin component such as novolak resin by 5-40wt% to the total amount of the resulting photosensitive composition, and this mixture is dissolved in a suitable solvent and applied to a support.
申请公布号 JPS5697341(A) 申请公布日期 1981.08.06
申请号 JP19800175901 申请日期 1980.12.15
申请人 OJI PAPER CO 发明人 HATA YUKINORI;WATANABE TSUTOMU;ITOU FUMIO
分类号 C08L101/00;C08L1/32;C23F1/00;G03C1/52;G03C1/72;H01L21/027;H01L21/30;H05K3/00;H05K3/06 主分类号 C08L101/00
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