发明名称 |
PHOTOSENSITIVE COMPOSITION |
摘要 |
PURPOSE:To form a film with high surface strength and high resistance to an etching soln. by adding a reaction product of a specified cellulose ether and an anhydrous aromatic polybasic carboxylic acid to a photosensitive resin component. CONSTITUTION:A cellulose ether compound such as hydroxypropylcellulose or hydroxypropylhydroxyethylcellulose represented by R<1>a, R<2>bA or R<3>cR<4>dR<5>eA is reacted with an anhydrous aromatic polybasic carboxylic acid such as tetrahydrophthalic anhydride to prepare a cellulose ether aromatic carboxylic acid ester compound. One or more kinds of such compounds are mixed with a resin component such as novolak resin by 5-40wt% to the total amount of the resulting photosensitive composition, and this mixture is dissolved in a suitable solvent and applied to a support. |
申请公布号 |
JPS5697341(A) |
申请公布日期 |
1981.08.06 |
申请号 |
JP19800175901 |
申请日期 |
1980.12.15 |
申请人 |
OJI PAPER CO |
发明人 |
HATA YUKINORI;WATANABE TSUTOMU;ITOU FUMIO |
分类号 |
C08L101/00;C08L1/32;C23F1/00;G03C1/52;G03C1/72;H01L21/027;H01L21/30;H05K3/00;H05K3/06 |
主分类号 |
C08L101/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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