| 摘要 |
PURPOSE:To prepare a thermosensitive printer head having a smooth surface without stepped portions nor faulty printing by a method wherein a metallic electrode having valve function on an insulating substrate and an insulator obtained by carrying out an insulating treatment on the same metal as the metallic electrode are formed and on them are provided a resistor and a protective membrane. CONSTITUTION:Al is evaporated on an alumina substrate 11 to form a thin plate 13 and a photoresist material is coated on said film, exposed and developed to obtain an intended resist pattern. Al is etched by phosphoric acid to obtain a metallic pattern, windows are made and masked on equivalent portions 15 of exothermic resistors and on portions of outgoing electrodes 16 for anodic oxidation to make patterning by the photoresist. When the portion 16 is subjected to anodic oxidation in an electrolyte such as sulfuric acid and so forth using the portion 16 as an anode, the portion 15 turns into an oxide. Then, when the photoresist is peeled off, Ta2N is spattered by a mask wider than the insulated portion to form resisting films, while the resisting films between individual electrodes are removed by further photoetching and SiO2 and Ta3O5 are spattered over the whole surface to form a protective film 18, whereby a smooth and thermosensitive printer head is obtained. |
