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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPS5635774(A)
申请公布日期
1981.04.08
申请号
JP19790109125
申请日期
1979.08.29
申请人
CHO LSI GIJUTSU KENKYU KUMIAI
发明人
OGIUE KATSUMI;KUREISHI YOSHINORI
分类号
C23F4/00;C23F1/00;H01L21/302;H01L21/3065;H05K1/00;H05K3/08
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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