| 摘要 |
PURPOSE:To stabilize washing quality by a mechanism wherein spongy discs, whose center has water injecting holes and which are provided with spiral water guide grooves in radial shapes from the holes, are oppositely disposed, pure water is injected and turned, and a substrate is inserted into the discs. CONSTITUTION:Spiral guide grooves 3 are formed from a central hole 2 of a spongy disc in synthetic resin. The patterns of guide grooves made up in the spiral lines of a spongy disc oppositely arranged to the said disc take the forms symmetrical to the former. Metallic discs 6, 6' are welded to metallic pipe shafts 4, 4', and the spongy discs 1, 1' are stuck. The shafts 4, 4' are located in a straight line, and a space 8 between the spongy discs is kept at dimensions slightly narrower than the thickness of a substrate 7 used for a photo-mask, etc. The discs 1, 1' are turned at high speed in the direction (9, 9') the same as the streamline direction of the water guide grooves 3, 3', pure water is injected through the holes 2, 2' from the shafts 4, 4' and accelerated, the substrate 7 is inserted into the void 8 and moved up and down, and both surfaces are rubbed with the sponge and washed. This constitution can mechanize washing, and improves washing quality. |
